Publications

in 2020



  1. Mata-Hernandez, D et al.,
    Resonant MEMS pressure sensor in 180 nm CMOS technology obtained by beol isotropic etching,
    Sensors. 20 (21): 6037- (2020) [DOI]
  2. Sánchez-Chiva, JM et al.,
    A cmos-mems beol 2-axis lorentz-force magnetometer with device-level offset cancellation,
    Sensors. 20 (20): 5899- (2020) [DOI]